【摘要】 提出了一种用于显示的,基于透射型法布里-珀罗干涉的微机电系统(MEMS)光学调制器。基于多光束干涉原理分析了调制器的光学特性,推导出了调制器结构的特征参量。分析表明,当调制器的腔长为cλ/4时,透射光可以实现暗态显示;当调制器的腔长取为零或cλ/2时,透射光可以实现亮态显示。通过控制法布里-珀罗腔长,就可实现调制器的明暗调制。理论上证明了该调制器用于显示的可行性。设计了一种基于微机电系统的透射型法布里-珀罗光学调制器结构,该调制器的理论衬比度达到150。仿真结果表明,该调制器具有2.4 V的低电压静电驱动性能。更多还原

【Abstract】 A transmitting Fabry-Pérot light modulator for display application is proposed.Its optical characteristics are analyzed with multiple beam interference theory.The typical parameters of the light modulator for display are deduced.When the Fabry-Pérot cavity length is λc/4,almost all transmitted light is cut off,the modulator is "off" state.While when the cavity length is 0 or λc/2,corresponding light can transmit the modulator,the modulator is "on" state.It is theoretically proved that this light modulator is capable for display.Finally,one light modulator structure based on micro-electro mechanical system(MEMS) is given.Contrast ratio of this device is 150 by theoretical calculation.Result of the software simulation shows that this structure has as low as 2.4 V actuating voltage.更多还原