【摘要】 为了研究可用于纳米、亚纳米精度的非线性误差校准系统,采用差拍F-P干涉法,在中国计量科学研究院研制的差拍F-P干涉仪基础上,设计并制作了适用于该系统的密封干涉光路的真空系统。通过与电容式测微仪的比对实验,证明了系统的抗干扰能力得到了改善,在大于半波长的测量范围内,系统的非线性度优于3.86nm。更多还原

【Abstract】 Heterodyne Fabry-Parot interferometer can be used in the nonlinear error calibration with an accuracy of nanometer and sub-nanometer order.The vacuum system that adjusts the interference light path is designed and built based on NIM’s heterodyne Fabry-Parot interferometer.Comparing with capacitance displacement measurement instrument,the system’s ability of anti-jamming is improved, and the nonlinear degree of this system in the range of longer than half of the wavelength is better than 3.86nm.更多还原