【摘要】 介绍了一种基于Matlab图像处理工具箱技术的评价硅片表面污染颗粒激光清洗率的新方法。借助Matlab图像处理工具箱,对清洗前后硅片表面光学显微镜照片进行处理,编写硅片表面激光干法清洗率的评价程序,统计清洗前后硅片表面评价区域的污染颗粒个数,对清洗效果进行定量评价。研究结果证明,利用此方法统计的颗粒数准确度达97.6%,得到的激光清洗率准确度达99.2%。结果表明,借助图像处理技术评定清洗效果是一种高效、快速、准确的新方法。更多还原

【Abstract】 Based on Image Processing Toolbox of Matlab technique,a new evaluation method of cleaning efficiency is presented in dry laser cleaning particles of silicon wafer surface.Image Processing Toolbox of Matlab is used to recognize optical information of silicon wafer surface before and after laser cleaning and the evaluating programs are developed to count the number of pollution particles on the silicon wafer and to evaluate the cleaning efficiency. The results show that the statistical accuracy of the method is 97.6%,and the laser cleaning accurate reaches 99.2%.The research achievement offers a effective,rapid and accurate new evaluation method.更多还原