【摘要】 介绍了微制造隔振试验平台定位系统运动轨迹的规划。为了减小运动部件加减速过程中对整个平台的冲击,在进行运动轨迹规划时,采用了S形曲线对定位系统的运动轨迹进行了平滑处理,有效降低了运动部件对系统的冲击,有利于系统的减振。更多还原

【Abstract】 Kinematic trajectory planning for isolation platform’s positioning system of Micro-manufacture is introduced in paper.In order to reduce the impulsion of the platform during the moving part accelerates or decelerates,it takes S-curve to smooth the kinematic trajectory of the positioning system.It has reduced the impact of the platform caused by the moving part availably which is benefit to the vibration reduction of the system.更多还原