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热压硫化锌基底上类金刚石膜的设计与实现

Design and Depositing of Diamond-like-CarbonOn Hot-press ZnS-sub

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【Author】 HONG Wei1;ZHAO Youbo2;ZHANG Tiequn2;SUEI Chenglin3(1 The 8358th Research Institute of China Aerospace Science& Engineering Group,Tianjin 300091,China; 2.Institute of Modern Optics,Nankai University,Key Laboratory of Opto-electronic Information Science and Technology;Lab EMC,Tianjin 300171,China 3.Machine repair factory,Road and bridge administrant Departmentalism of Tianjin,Tianjin 300220,China)

【机构】航天科工集团三院8358所；南开大学现代光学研究所光电信息技术科学教育部重点实验室；天津市道路桥梁管理处机械修理厂天津300092；天津300071；天津300220；

【摘要】讨论了在ZnS窗口和整流罩上实现DLC膜的方法,给出了膜系和实验结果.从测试结果可以看出,ZnS基片、Si膜和DLC膜在7~10μm的平均透过率比以往的双面减反射膜有了明显的提高,不仅满足了技术指标的要求,而且也有利于DLC膜应用领域的进一步拓展.更多还原

【Abstract】 The method of depositing Diamond-like-Carbon on ZnS-substrate was discussed,and the corresponding experimental results were given.Based on analysis of coating samples,we demonstrated that average transmittances of ZnS-sub,Si-coating,DLC for wavelengths between 7～10 μm had been improved significantly compared to the old double-coated anti-reflecting film.This not only satisfied technical requirements,but also could enhance the development of applications of DLC.更多还原

【关键词】硫化锌；类金刚石膜；化学气相沉积；热压；射频等离子放电法；
【Key words】 ZnS； diamond-like-carbon； chemistry vaporization deposition； hot press； radio frequency chemistry vaporization deposition；

【基金】光电信息技术科学教育部重点实验室资助项目(2005-19)

【文献出处】光电技术应用 ,Electro-Optic Technology Application , 编辑部邮箱 ,2007年06期

【分类号】TB383.2
【被引频次】2
【下载频次】90

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