【摘要】 碳纳米管暴露在空气中会引起其电子特性的改变.使用微电子工艺在硅衬底上制备出生长碳纳米管的阵列图形,使用热CVD法实现碳纳米管在硅平面上的定点生长.研究了不同温度下空气氛围对多壁碳纳米管电子特性的影响.实验结果表明,空气中的水分子和氧气都会影响碳纳米管的电子特性.在室温环境中,水分子对碳纳米管电子特性的影响起主要作用,随着环境温度的升高,氧气对碳纳米管电学性质的变化起主要作用.更多还原

【Abstract】 Electronic properties of carbon nanotubes are dramatically influenced by exposuring to air. Array configurations are defined by microelectronic fabrication technology. Carbon nanotubes are grown selectively in the predefined array configurations by thermal CVD. Effect of air environment on electronic properties of carbon nanotubes is investigated under different temperatures. The results show that the properties of carbon nanotubes are influenced by both water vapor and oxygen in air. Water vapor play a key role in room temperature and oxygen has the leading effects on the properties of carbon nanotubes with increasing temperature.更多还原