Study on the Properties of TiN Coatings on Previously Ion-Implanted Pure Magnesium Surface by MEVVA Ion Implantation

【摘要】 <正> A metal vapor vacuum arc （MEVVA） is used in ion implantation for substrate prepa-ration before the deposition process which would ensure the improvement of mechanical propertiesof the coating.Ti ion is implanted into pure magnesium surface by MEVVA implanter operatedwith a modified cathode.Implanting energy is kept at 45 keV and dose is set at 3×10¹⁷ cm^-2.TiN coatings are deposited by magnetically filtered vacuum-arc plasma source on unimplantedand previously implanted substrates.Microstructure and phase composition are analysed usingscanning electron microscopy （SEM） and X-ray diffraction （XRD）.The property of corrosion re-sistance of TiN coatings was studied by CS300P electrochemistry-corrosion workstation,and themain impact factor of the corrosion resistance was also analyzed.更多还原

【Abstract】 A metal vapor vacuum arc （MEVVA） is used in ion implantation for substrate prepa- ration before the deposition process which would ensure the improvement of mechanical properties of the coating.Ti ion is implanted into pure magnesium surface by MEVVA implanter operated with a modified cathode.Implanting energy is kept at 45 keV and dose is set at 3×10¹⁷ cm^-2. TiN coatings are deposited by magnetically filtered vacuum-arc plasma source on unimplanted and previously implanted substrates.Microstructure and phase composition are analysed using scanning electron microscopy （SEM） and X-ray diffraction （XRD）.The property of corrosion re- sistance of TiN coatings was studied by CS300P electrochemistry-corrosion workstation,and the main impact factor of the corrosion resistance was also analyzed.更多还原