A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition

【摘要】 <正> In order to deposit good films,we need to study the uniformity of plasma density andthe plasma density under different gas pressures and powers.The plasma density was diagnosedby a Langmuir probe.The optical emission spectroscopy（OES）of CH₄ and H₂ discharge wasobtained with raster spectroscopy,with characteristic peaks of H and CH achieved.Diamond-likecarbon films were achieved based on the study of plasma density and OES and characterized byatomic force microscope（AFM）,X-ray diffraction instrument（XRD）,Raman spectroscope andprofiler.更多还原

【Abstract】 In order to deposit good films,we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers.The plasma density was diagnosed by a Langmuir probe.The optical emission spectroscopy（OES）of CH₄ and H₂ discharge was obtained with raster spectroscopy,with characteristic peaks of H and CH achieved.Diamond-like carbon films were achieved based on the study of plasma density and OES and characterized by atomic force microscope（AFM）,X-ray diffraction instrument（XRD）,Raman spectroscope and profiler.更多还原