【摘要】 详细介绍了一种高精度原子力显微镜AFM.IPC-208B的结构与性能以及三氧化钨溶胶-凝胶掺铂薄膜和三氧化钨磁控离子溅射掺铂薄膜的制备。利用AFM.IPC-208B研究了2种三氧化钨晶化薄膜表面的分子结构,并对其X射线衍射谱进行了分析。结果发现,磁控溅射三氧化钨掺铂复合薄膜在400℃下晶化,(106)面为其自然生长面,自然生长面上含有3个钨离子,7个氧离子(或2个钨离子,8个氧离子),分别位于4个相连的四边形的顶点,晶格常数为0.35±0.05nm,1.35±0.05nm;三氧化钨溶胶-凝胶掺铂复合薄膜经460℃热处理后晶化,自然生长面为(002)面,在(002)面上有5个离子,4个氧离子位居四边形的顶点,钨离子处于四边形的中心,氧离子间距为0.55±0.05 nm,晶格常数为0.75±0.05nm。同时,原子力显微镜图像所测得各晶格常数得到了X射线衍射谱的验证。更多还原

【Abstract】 In this paper,the structure and performance of AFM.IPC-208B are introduced in detail,and the preparation of WO₃ sol-gel film adulterated with platinum and WO₃ magnetron ion sputtering film adulterated with plat- inum is also described.Their surface molecular structures are studied by AFM.IPC-208B,and their XRD spectrums are also analyzed.Those studies on WO₃ magnetron ion sputtering film adulterated with platinum show that it is plate crys- tal after annealing at 400℃,and its natural growth surface is（106）plane on which there are three tungsten ions and seven oxygen ions or two tungsten ions and eight oxygen ions.These ions locate in the culminations of four coterminous quadrangles,and their lattice parameters are about 1.35±0.05 nm and 0.35±0.05 nm,respectively.Meanwhile those studies on WO₃ sol-gel film adulterated with platinum show that it is cubic crystal after annealing at 460℃,and its nat- ural growth surface is（002）plane on which there are five ions.Four oxygen ions locate in the culminations of quadran- gle and one tungsten ion locates in the center of quadrangle.The distance between two adjacent oxygen ions is about 0.55±0.05 nm,and their lattice parameter is about 0.75±0.05 nm.更多还原