【摘要】 采用多弧离子镀技术制备了TiN/AlN纳米多层膜,并通过多层膜在酸中的浸泡试验及极化曲线测定,对比研究了TiN/AlN纳米多层膜和TiN薄膜的耐蚀性能。结果表明,由于TiN/AlN纳米多层膜中铝的钝化作用及薄膜的特殊层结构,TiN/AlN纳米多层膜比TiN薄膜具有更优良的耐腐蚀性能。更多还原

【Abstract】 Supperlattice TiN/AIN nano-multilayer has higher hardness, excellent wear resistance and anti-oxidation ability, and it will be extensively applied to the coatings on cutting tools, forming tools, and die mold in future. But there was less study on the corrosion resistance of TiN/AIN nano-multilayer. In this paper, TiN/AIN nano-multilayer was prepared via multi-arc ion plating. The results of XRD showed that the supperlattice TiN/AIN nano-multilayer with period of 3. 7 nm was obtained. The corrosion resistance of TiN/AIN nano-multilayer was investigated in contrast with TiN thin film via polarization curve and immersion test in acid solution. The results showed that TiN/AIN nano-multilayer provided excellent corrosion resistance on account of the passivation role of Al and special multilayer structure.更多还原