【摘要】 提出了一种光探测器芯片小信号等效电路模型及其建立方法.首先根据光探测器的物理结构确定其等效电路模型,模型考虑了影响光探测器高频性能的主要因素.然后精确测量了光探测器芯片的S参数,通过遗传算法对测量的S参数进行拟合,最终计算出模型的各个参量.在130MHz~20GHz范围内的实验结果表明,模型仿真结果与测量结果相吻合,证明了建模方法的可靠性.该模型有效地模拟了光探测器芯片的高频特性,利用该模型可以对光探测器及相应光电集成器件进行电路级仿真和优化.更多还原

【Abstract】 A small-signal equivalent circuit model and the extraction techniques for photodetector chips are presented.The equivalent lumped circuit,which takes the main factors that limit a photodetector’s RF performance into consideration,is first determined based on the device’s physical structure.The photodetector’s S parameters are then on-wafer measured,and the measured raw data are processed with further calibration.A genetic algorithm is used to fit the measured data,thereby allowing us to calculate each parameter value of the model.Experimental results show that the modeled parameters are well matched to the measurements in a frequency range from 130MHz to 20GHz,and the proposed method is proved feasible.This model can give an exact description of the photodetector chip’s high frequency performance,which enables an effective circuit-level prediction for photodetector and optoelectronic integrated circuits.更多还原