【摘要】 研究抛光垫表面特性有利于了解和分析硅片化学机械抛光(CMP)材料的去除机理及优化抛光垫的微观结构。使用ZYGO 5022轮廓仪、SEM等仪器研究了IC1000/SubaIV平抛光垫表面粗糙度、表面组织结构、孔隙率、微孔深度及直径、抛光垫表面微凸峰分布形式及面积支承率,测量和计算的结果:抛光垫表面粗糙度为σp(RMS)=6.8μm,均方根粗糙度9.4μm,表面孔隙率为56%,平均孔径为36μm,平均孔深为20μm,平均孔距为43μm,微孔数量为550个/mm2,抛光垫表面微凸峰高度服从高斯分布。更多还原

【Abstract】 Studying the surface characteristics of polishing pad helps to understand and analyze the chemical mechanical polishing(CMP) mechanism and optimize the microscopic structure of polishing pad.The surface roughness,organizational structure,porosity,depth and diameter of microporous,distribution of asperity and profile bearing rate of IC1000/SubaIV polishing pad were studied with the ZYGO 5022 profilometer and SEM.The results of measurement and calculation show that the surface roughness is 6.8μm,the root-mean-square(RMS) roughness is 9.4 μm,the surface porosity is 56%,the microporous average diameter is 36 μm,the microporous average depth is 20 μm,the microporous average spacing is 43 μm,the microporous average volume is 550/mm2 and the asperity height obeys Gaussian distribution.更多还原