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Hg在As激活退火中的作用
Effect of mercury in arsenic activation
【摘要】 对原位 As4掺杂 MBE HgCdTe 材料退火前后的电学性质进行了研究。原生样品以及 N 型退火样品的测试结果显示,随着 As 掺杂进入 HgCdTe 的同时,样品中产生了额外的 Hg 空位,并且在样品中引进了一种 N 型深能级结构。不同 Hg 分压下的激活退火结果显示,高温汞压下退火可以获得 P 型 MBE HgCdTe 材料。但是,真空退火结果显示 As 很难被激活。说明在激活退火过程中 As 在各个格点之间转移时,外界的 Hg 起重要作用。
【Abstract】 The study of the electrical properties of the arsenic doped as-grown and annealed MBE HgCdTe is presented.The results of the as-grown samples and N-type annealed samples show that additional VHg is produced and there are some donors which have deeper energy level during arsenic doping into HgCdTe.The results of annealed samples under different mercury pressures show that P-type MBE HgCdTe could be obtained by doping with the As4 source and annealing with high temperature.But result of vacuum-anneals show arsenic is hard to activated as acceptors in this condition.It shows that the ambient mercury plays an important role in the site-transfer process during the activation anneals.
- 【文献出处】 红外与激光工程 ,Infrared and Laser Engineering , 编辑部邮箱 ,2006年S5期
- 【分类号】TN305
- 【被引频次】4
- 【下载频次】48