【摘要】 微细加工技术是现代机电领域新兴学科微机电系统(MEMS)研究的关键技术之一。分析了近年来微机械领域的主要微细加工方法、能达到的加工尺度与水平、加工范畴及应用;阐述了微细加工技术的发展趋势。更多还原

【Abstract】 The micro-machining technology is one of the key technologies in emerging micro electro mechanical system(MEMS)in modern mechtronical domain,this paper analyzes the main micro-machining processes,precision and level which could achieve and application in recent years.It also introduces micro-machining technology development tendency.更多还原