【摘要】 纯铝薄膜以其低声阻抗特性被广泛应用于声表面波(SAW)器件的制作。随着通讯频率的不断提高,对SAW器件用Al薄膜的功率承受力以及与基体的附着力提出了越来越高的要求。采用少量易于反应离子刻蚀的Mo元素掺杂来改善Al合金的抗电迁移和功率承受力,并以数纳米的Ti过渡层增强Al-Mo合金薄膜的取向性。结果表明:Ti/Al-Mo薄膜表现出强(111)织构,与纯Al薄膜相比,晶粒明显细化且致密均匀,临界载荷大大增加,与基体的附着力显著增强,并具有良好的刻蚀性能。更多还原

【Abstract】 Al films are widely used in surface acoustic wave（SAW） devices because of their low acoustic impedance.With increasing the frequency of SAW devices,both high power durability and strong adhesion of Al films are required.Mo additive was used to improve the anti-electromigration and power durability of Al films.A Ti underlayer of 10 nm thickness was used to enhance the orientation of the Al-Mo films.The results indicate that highly oriented Al（111） texture is developed on the Ti underlayer.The Ti/Al-Mo films decrease grain size and show dense and uniform surface compared with the pure Al films.The critical load and adhesion to the LiNbO₃ substrates of the Ti/Al-Mo films are largely increased.The Ti/Al-Mo films are also easily etched in reactive ion etching.更多还原