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Preparation and properties of SrBi2.2 Ta2O9 thin film

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【作者】 王文； 贾德昌； 周玉；

【Author】 WANG Wen, JIA De-chang, ZHOU Yu(Department of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China)

【机构】 Department of Materials Science and Engineering； Harbin Institute of Technology； Harbin 150001； China； China；

【Abstract】 SrBi2.2 Ta2O9（SBT） thin film with thickness of 2μm was successfully prepared by sol-gel method, using strontium acetate semihydrate [Sr（CH3COO）2·1/2H2O] and bismth subnitrate [BiO（NO3）], and tantalum ethoxide [Ta（OCH2CH3）5] as source materials, glacial acetic and ethylene glycol as solvents. The X-ray diffraction（XRD） and transmission electron microscope（TEM） results indicate that SBT layer-perovskite phase obtained has to be single phase, SBT thin film is formed after being annealed at 800℃ for 1min. The typical hysteresis loop of SBT thin film on Pt/Ti/SiO2/Si is obtained, and the measured polarization value of the SBT thin film is 4.2μC/cm2.

【关键词】 SrBi2.2 Ta2O9； sol-gel technique； thin film； ferroelectric；
【Key words】 SrBi2.2 Ta2O9； sol-gel technique； thin film； ferroelectric；
【基金】 Project(HIT.2001.67)supportedbytheScientificResearchFoundationofHarbinInstituteofTechnology;project(50172012)supportedbytheNationalNaturalScienceFoundationofChina
  • 【文献出处】 Journal of Central South University of Technology(English Edition) ,中南工业大学学报(英文版) , 编辑部邮箱 ,2005年04期
  • 【分类号】TB43
  • 【下载频次】37
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