【摘要】 介绍了一种用于真空镀膜的等离子溅射高频PWM电源,并对其硬件电路包括主电路和控制电路的设计、软件程序开发及电源设计中的系统抗干扰等问题进行了阐述。更多还原

【Abstract】 Introduces a high-frequency PWM power supply used for vacuum ion sputtering film deposition. The design of its hardware circuit including main circuit and control circuit, development of software and solution to the problem of interference in the system are all presented.更多还原