【摘要】 在真空条件下利用真空电弧源在不同基底材料上镀制了TiO2薄膜。对影响镀膜过程和膜层质量的氧气工作压强和偏压等因素进行了研究。X射线衍射结构分析结果显示TiO2薄膜主要以锐钛矿相为主及少量的金红石相。对TiO2薄膜的物理性质、化学性质进行了初步检测。更多还原

【Abstract】 TiO₂ thin films were deposited on different substrates in vacuum by way of cathode arc discharge. Investigates the influences of working pressure of oxygen and voltage bias on the deposition process and thin film quality. XRD patterns of the TiO₂ thin films deposited indicated that they are mainly composed of anastate phase with little of rutile. The physical/chemical properties of the TiO₂ thin films prepared in this way were tested preliminarily.更多还原