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磁控溅射制备纳米TiO2薄膜光催化降解苯酚的研究

Phenol Photo-Catalystic Degradation with Nano-TiO2 Films Grown by RF Magnetron Sputtering

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【作者】 张丽丽刘彭义仲飞翟琳孙汪典

【Author】 Zhang Lili,Liu Pengyi~*,Zhong Fei,Zhai Lin and Sun Wangdian (School of Science and Technology,Jinan University,Guangzhou 510632,China)

【机构】 暨南大学理工学院暨南大学理工学院 广洲510632广洲510632教授广洲510632

【摘要】 采用射频磁控溅射方法分别在玻璃、A1片和ITO玻璃上制备出性能优良的TiO2纳米薄膜,研究了薄膜光催化性能。通过XRD、SEM和UV-Vis吸收光谱对薄膜进行表征,研究了不同退火温度和不同衬底对薄膜光催化性能的影响。结果表明:薄膜经500℃退火处理,TiO2由非晶转变为锐钛矿结构,并且退火后薄膜的紫外吸收波长发生红移,光催化降解性能提高;比较玻璃I、TO玻璃和A1为衬底制备的TiO2薄膜,以A1片为衬底的TiO2薄膜,由于形成Schottky势垒,光催化性更好。

【Abstract】 Nano-TiO2 films were grown by RF magnetron sputtering on different substrates,including quartz glass,ITO coated glass and aluminum foil,to study its influence on photocatalystic degradation of phenol.The microstructures and optical properties of the films were characterized with X-ray diffraction (XRD),scanning electron microscopy (SEM) and ultraviolet-visible (UV-vis) light absorption.The results show that the type of substrate and annealing temperature of TiO2 films significantly affect the photocatalystic degradation of phenol.For instance,it markedly improves when the TiO2 films,grown at room temperature,are annealed at 500℃;and amorphous TiO2 turns into anatase and a red shift of UV absorption occurs.Moreover,the TiO2 films grown on A1 foil work better than the films on either glass or ITO coated glass,possibly because of Schottky barrier formation at the interface of TiO2 and A1.

【基金】 广东省自然科学基金项目(No.021169)
  • 【文献出处】 真空科学与技术学报 ,Chinese Journal of Vacuum Science and Technology , 编辑部邮箱 ,2005年04期
  • 【分类号】TN304;
  • 【被引频次】4
  • 【下载频次】222
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