【摘要】 概述了ITO的特性和它在PDP显示中所起的作用。通过大量实验摸索了一套适合实验室制作刻蚀ITO膜的工 艺,其中包括涂胶、擦边、曝光、显影、刻蚀等。更多还原

【Abstract】 The characteristics of ITO films and its performance in PDP are illustrated.The etching technologies of ITO films suitable for laboratory operation, including gelatinization, border scouring, exposal, development, etching and so on ,are obtained after a series of experiments.更多还原