【摘要】 将实现微尺度温度测量的技术按其温度控制方式分为两类,即控制探针的温度和控制样品的温度,所对应的仪器为扫描热显微镜和各类可直接应用于普通扫描探针显微镜的变温样品台,分别介绍其结构、工作原理及应用情况,分析了这两类具有不同控温方式的仪器的区别,并进一步讨论了目前在扫描探针显微镜变温辅助设备中仍然存在的问题以及实现变温扫描的扫描探针显微镜的发展前景。更多还原

【Abstract】 We divide measuring techniques on temperature in micro-scale into two kinds in terms of temperature control mode, namely temperature control of probe and temperature control of sample, and the corresponding devices include scanning thermal microscope and variable-temperature sample stage that can be utilized in general scanning probe microscope directly. This paper introduces the structure, principle of work and application of these devices separately and analyzes the differences in two kinds of devices, furthermore, discusses the unsolved problems that lie in variable-temperature assistant devices of scanning probe microscope at present and development prospect of variable-temperature scanning probe microscope.更多还原