【摘要】 针对微尺度复杂三维结构加工中的关键部件———三维微进给平台进行了研究。对国内外的高精度运动平台的原理及特点进行了总结和分析。目前还没有百毫米行程、精度可达纳米级的进给平台。针对这一点 ,文中提出了几种可满足上述要求的进给平台的设计方案 ,并分析了各自的优缺点。更多还原

【Abstract】 DOF (Dimension of freedom) feeding table is the key part when 3-DOF structure parts are machined. The principles and characteristics of high-precision feeding tables in domestic and abroad are concluded and analyzed in this paper. Up to now, the products of nanometer absolute accuracy and hundreds millimeter travel are absent. Several schemes of multi-DOF feeding table meeting the above described requirements are proposed and their advantages and disadvantages are analyzed.更多还原