【摘要】 在我们研制的激光微加工闭环控制系统中 ,光栅尺作为位置传感器 ,其分辨率决定控制系统的精度。由于光栅尺分辨率为 4μm很难满足系统的要求 ,因此设计了基于FPGA光栅尺处理电路 ,实现了四细分、辨向和可逆计数 ,使分辨率达到1μm ,提高了运动控制系统的精度更多还原

【Abstract】 A grating scale acts as the position sensor in a self-developed laser micro-processing system, a closed loop movement control system, and the resolving power of the grating scale limits the control accuracy of this system. Since the grating scale resolving power is 4μm which is insufficient in this system, a grating scale signal processing circuit based on FPGA is applied in this system to improve the grating scale resolving power and the control accuracy of this system. The circuit accomplishes functions of four-fold subdivision, discerning direction and counter with 1μm grating scale distinguish ability.更多还原