【摘要】 介绍了一种基于MEMS技术的雾化微喷的设计、仿真、加工和实验结果。该微喷以压电效应为驱动方式,通过压电片振动所产生的压力使液体从阵列微喷孔中喷出,所产生的液滴直径和速度分布集中,无热效应,不会破坏药液的物理和化学特性。通过有限元仿真分析了微喷液体腔内压力波的分布,并根据仿真结果优化了微喷孔的布置。实验结果表明,该微喷所产生的液滴平均直径15μm,平均速度3m/s。更多还原

【Abstract】 This paper presented design,simulation,manufacturing and experiments of a novel micro nebulizer based on MEMS technology.The nebulizer adopted piezoelectric transducer as the actuator.Inside the liquid chamber, the pressure waves were generated by vibration of the piezoelectric transducers and propagated in the chamber;the liquid was ejected from the nozzles by pressure to form droplets.The diameter and velocity had a narrow distribution.It did not generate heat and chemical reaction,so it wouldn’t change the properties of the fluid,which is critical for many medicines.The arrangement of the nozzles was based on FEM analysis of distribution of pressure waves in the fluid chamber.The experiments show that the average diameter and velocity of the droplets is of 15 um and 3m/s respectively.更多还原