【摘要】 设计了一种基于直线音圈电机直接驱动并采用新型弹性解耦机构的高速高精度XY精密定位平台。详细介绍了该装置的结构形式和动态设计方法,并对研制样机进行了性能测试。测试结果表明,该新型精密定位平台具有很高的速度、加速度和精度,能够适应集成电路封装业发展对封装设备提出的新要求。更多还原

【Abstract】 In order to overcome the limitations of conventional XY table used for semiconductor IC packaging, a voice coil actuator direct-drive high speed and high precision XY table used for wire bonding was developed. A new flexible decoupling mechanism was used in the high speed and high precision XY table. The detailed description of the XY table structural style and its dynamic design approach were also presented. The experimental results indicate the XY table prototype is of high speed and high accuracy. This XY table performance can meet the requirement of IC packaging development.更多还原