【摘要】 为研究MEMS的微摩擦需设计一种能够测量微米尺度样品摩擦特性的专用仪器,尤其是能进行微机构摩擦力和正压力测试的大范围、高灵敏度的微摩擦检测装置。给出了一种基于光反射法的微摩擦测试仪的设计方法,介绍了该仪器的设计原理、测力传感器的结构设计、仪器的标定方法。硅测力传感器采用MEMS工艺制作,具有变形量大、线性度好、灵敏度高等优点。实验结果表明,该测试仪能满足微机电系统微摩擦测试的需要。更多还原

【Abstract】 This paper proposed a new reflection method in micro-friction testing, including its design principles, structure of micro-force sensor, demarcating method of the apparatus. The micro-force sensor was made up of silicon slice by MEMS technique, it has some unique advantages that the ordinary sensor hasn’t, e.g. large deformation, good linearity, high sensitivity etc. This apparatus can meet the needs of micro-friction testing.更多还原