【摘要】 介绍了一种新型多晶硅电热微夹钳,该夹钳在V形电热微驱动器的作用下,能够产生近似线性的位移和产生较大的夹持力。在全面考虑了空气对流、辐射、热传导及材料特性等各种因素的情况下,建立了该电热微夹钳的有限元模型,利用该模型分别进行了稳态和瞬态的仿真分析,模拟出输出位移和温度场随电压的变化情况,以及电热微夹钳的热响应时间。对仿真的结果进行了讨论。更多还原

【Abstract】 An electrothermal microgripper that generates rectilinear displacements and forces by V-shaped microacturator beam deformations caused by thermal stress was presented. A finite element model of the microgripper was developed, which taken heat conduction, air natural convection,heat radiation and the property of polysilicon into account. Using this modeling technique, both static and transient analyses have been performed on the electrothermal microgripper. Output displacements and average temperature of the microgripper dependent upon input voltages were simulated. As well as thermal responsive times of the microgripper were gained. Finally the simulation results were discussed.更多还原