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毫米级全方位移动机器人及其微装配系统研究

Omni-directional Mobile Microrobot and Its Micro Assembly System

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【作者】 陈佳品李振波唐晓宁

【Author】 Chen Jiapin Li Zhenbo Tang Xiaoning Key Laboratory for Thin Film and Microfabirication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Shanghai Jiao Tong University, Shanghai,200030

【机构】 薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室上海交通大学上海交通大学 上海200030上海200030

【摘要】 微装配系统由微机器人、微移动平台、普通摄像头和显微摄像头组成。微机器人本体尺寸为9mm×9mm×6mm,具有全方位移动特性。机器人使用了4个直径3mm电磁型微电机,其中1个为转向驱动器,其余为前进动力源。基于LIGA技术制造的微齿轮减速系统将4个电机联系在一起,提高了转向分辨率和转向驱动力矩。由SU-8胶制成的手掌固定于压电机械手臂的前端并安装在机器人的顶部,可夹放工件。通过采用细分方法,微机器人直线移动定位达到每步0.07mm,转向精度每步0.8°。微移动平台的定位精度为每步0.005mm,其位移范围为0~0.3mm。微机器人与微动平台相互结合实现了轴孔装配,轴承孔径为0.6mm,轴径0.35mm。

【Abstract】 The paper introduced a micro-assembling system which was based on a mobile microrobot. The size of the microrobot is less than a cubic centimeter. It was constituted by 4 micromotors. Three electromagnetic motors were used as driving wheel directly. Another one was used as steering driver to control direction. A micro gear system which was made by LIGA linked the four micromotors. It enhances the directional changing precision and driving forces. The rotors of the motors were used as special castors directly. The experimental results from a prototype of a microrobot are presented, which demonstrate the feasibility of building an omni-directional microrobot with micromotor and special castors. The mobile microrobot can move at 0.07mm/step and steer 0.8°/step. This microrobot realized the task of axis/hole assembly.

【基金】 国家自然科学基金资助项目(60475037);国家863高技术研究发展计划资助项目(2002AA422220)
  • 【文献出处】 中国机械工程 ,China Mechanical Engineering(中国机械工程) , 编辑部邮箱 ,2005年14期
  • 【分类号】TP242
  • 【被引频次】25
  • 【下载频次】373
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