【摘要】 采用溶胶-凝胶技术,使用旋涂方法在K9玻璃和单晶硅片上制备各种光学薄膜,并用紫外光源作为高能光子源辐照溶胶-凝胶光学薄膜。使用扫描电镜(SEM)、原子力显微镜(AFM)、椭偏仪、铅笔硬度仪等测量和分析薄膜的特性。用输出波长1 064 nm、脉宽15 ns电光调Q激光系统测试薄膜的激光损伤阈值。结果表明,紫外光辐照可提高薄膜折射率和机械性能。采用紫外预处理还能将节瘤缺陷转换成孔洞缺陷,从而有效提高薄膜的激光损伤阈值,其中,单层ZrO2薄膜的激光损伤阈值达到50.6 J/cm2(1 064 nm,1 ns)。与当前流行的激光预处理技术相比,紫外预处理的设备简单、易于操作。溶胶-凝胶多层膜经紫外光处理后,有效提高了多层膜膜层的均匀性。更多还原

【Abstract】 Sol-gel optical films were deposited on K9 glass and silicon wafer substrates by spin-coating method and a high-pressure mercury lamp was used to perform ultraviolet treating to solidify these films and improve their performance.SEM,AFM,IR and ellipsometer were used to characterize the structure and optical properties of the films.Mechanical property of films was measured by pencil hardness-testing device.Laser damage threshold of films was measured by a Q-switched Nd:YAG high power laser with the wave length of 1 064 nm and the pulse width of 15 ns.The results show that UV-irradiation can improve the mechanical property and increase the refractive index of the films.Besides,the nodules on the surface of the films can be changed into pits by UVirradiation process,so the laser damage threshold of sol-gel thin films will be increased.After UV-irradiation the laser damage threshold of single-layer ZrO₂ film reached 50.6 J/cm²（1 064 nm,1 ns）.It is found that UV-irradiation is an effective method to avoid the infiltrating between the layers,and the degree of homogeneity of the multilayer films can be improved by this way.更多还原