【摘要】 对Al/Zr V/Mo多层膜的吸氘性能进行了实验研究。铝膜仅在320 ℃有单一的除气峰,Zr V膜的除气峰有2个,分别为220和350 ℃。当铝层平均厚度小于 0 6μm时,Al/Zr V多层膜的除气峰类似于Zr V膜;大于0 6μm时,类似于铝膜。多层膜的吸氘量随铝膜的厚度增加逐步减小,直至铝膜的平均厚度为0 7μm后,吸氘量不再有大的变化,但有小幅波动。由于 Al膜在除气中有不同程度的破坏,当铝膜平均厚度小于0 6μm时,多层膜的吸氘速率变化行为类似于 Zr V膜;当铝膜厚度大于 0 6μm时,多层膜的吸氘速率受铝膜厚度的影响不大。更多还原

【Abstract】 Deuterium absorption property of Al/Zr-V/Mo multifilms was studied experimentally to explore the effect of Al film. There is only one desorption peak at 320 ℃ for Al film, two desorption peaks at 220 ℃ and 350 ℃ for Zr-V film. When the average thickness of Al film is less than 0.6 μm, the desorption property of Al/Zr-V multifilms is just as Zr-V film, when it is more than 0.6 μm, just as Al film. Deuterium absorption by Al/Zr-V multifilms decreases as the thickness of Al film increases until 0.7 μm, then the deuterium absorption no longer changes significantly. The Al film of multifilms cracks on desorbing, so the absorption rate varies as Zr-V film when the thickness of Al film is less than 0.6 μm. When the thickness of Al film is more than 0.6 μm, the deuterium absorption rate of multifilm doesn’t change with the thickness of Al film.更多还原