【摘要】 随着微电子机械系统(MEMS)研究的深入和产业化的需求,检测技术在MEMS中的重要性越来越大。基于机器微视觉原理组建MEMS动态测试系统,在此系统之上,提出模糊图像合成技术对MEMS器件的平面微运动特性如谐振器的运动幅度、谐振频率等重要参数进行了测试,给出了测量结果,并对测试结果进行了分析和讨论。更多还原

【Abstract】 Testing technique is more and more important as MEMS steps into industrialization.One testing system to characterize dynamic microstructures based on computer micro-vision technique is designed.Based on this system a new method for characterizing the Performance of MEMS is described.That is the technique of blur image synthesis.On the basis of this technique motion characteristics of MEMS micro-resonator such as motion amplitude and resonant frequency are described.Results obtained using these methods are discussed.更多还原