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纳米测量技术的挑战与机遇

Challenges and Opportunities of Nanomeasurement Technology

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【作者】 陈本永; 李达成;

【Author】 Chen Benyong1 Li Dacheng2 1 (Center of Nanotechnology, Zhejiang Sci-Tech University, Hangzhou 310018,China) 2 (State Key Lab of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084,China)

【机构】 浙江理工大学微纳米测控技术中心; 清华大学精密测试技术及仪器国家重点实验室 杭州310018; 北京100084;

【摘要】 纳米测量技术是纳米科学技术的基础学科之一。纳米科学技术的快速发展,不但给纳米测量技术提出了挑战,同时也给纳米测量技术提供了全新发展的机遇。综述了国内外纳米测量技术发展的现状,重点讨论了纳米材料、纳米电子学和纳米生物学等领域所涉及的纳米测量与性能表征的难题和挑战,论述了纳米科技成果给纳米测量技术带来的发展机遇,最后对纳米测量技术的发展方向做了展望。

【Abstract】 Nanomeasurement technology is one of the fundamental disciplines of nanotechnology. The rapid development of nanotechnology not only brings challenges but also offers new opportunities to nanomeasurement technology. The latest progress on nanomeasurement technology is reviewed; some difficulties and challenges of nanomeasurement and property characterization faced in the fields of nanomaterial, nanoelectronics and nanobiology are discussed in detail;and some opportunities of nanomeasurement technology offered by the achievements in nanotechnology are briefly introduced. Finally, the future research areas and developing directions in nanomeasurement technology are presented.

【关键词】 纳米科学技术; 纳米测量; 纳米材料; 纳米电子学; 纳米生物学;
【Key words】