【摘要】 在DSP上实现的数字锁相测试系统,采用数字锁相算法来完成对信号的锁相测试。基于该系统开发出了简单、可靠、可调性好并具有较高精度的PZT铁电薄膜介电性能测试系统。实验表明,使用该系统测得的样品介电常数的相对误差小于1 %,能够满足PZT铁电薄膜制备技术以及微机电系统中器件设计对薄膜性能测试的要求。更多还原

【Abstract】 PZT film is one of the most useful functional materials and has been very widely used in MEMS. So it is important to measure the diectric properties of the PZT film accurately and quickly. A measurement system based on digital phase-sensitive detection has been constructed for PZT film diectric properties. The digital phase-sensitive detection algorithm and the system construction are discussed. The performance of the system is also discussed. Compared with a commercial lock-in amplifier, the relative error of the actual measurement of homemade PZT films is less than 1%.更多还原