【摘要】 采用溶胶-凝胶(Sol-Gel)工艺在普通玻璃基片上成功地制备出高c轴择优取向性、高可见光透过率和低电阻率的Al3+掺杂型的ZnO透明导电薄膜,对这种薄膜进行了X-射线衍射和扫描电镜分析,并对其光电性能作了详细的研究。结果表明,制备的薄膜为钎锌矿型结构,呈c轴方向择优生长;其可见光透过率可达85%以上;Al3+掺杂型的ZnO透明导电薄膜的电阻率在1.5×10-2~8.2×10-2Ω.cm。更多还原

【Abstract】 In this paper,Al:ZnO films on glass substrate were prepared by Sol-Gel method successfully with highly preferred orientation along the（002） plane,high transmittance in the UV,US and near IR ranges and low electrical resistivity.Their microstructures,electrical and optical properties were studied with X-ray diffraction spectroscopy（XRD） and SEM.The result showed that they had a polycrystalline hexagonal wurtzite structure with highly preferred orientation along the（002） plane,their optical transmittance were over 85% and their electrical resistivity varied from 1.5×10^-2 Ω·cm to 8.2×10^-2 Ω·cm.更多还原