【摘要】 介绍了一种不同于振动式微机械陀螺仪的新型微机电系统陀螺-悬浮转子式微机械陀螺仪,并就国内外关于磁悬浮转子微陀螺和静电悬浮转子微陀螺研究的各种结构及其工作原理、工艺和性能特点进行了概述,以展示这一新颖微陀螺的研究现状和发展趋势。更多还原

【Abstract】 Differing from micromachined vibratory gyroscopes, a new type of MEMS gyroscope, a micromachined rotational gyroscope with levitating rotor, is described. By summarizing most results on electromagnetically levitated rotational gyroscopes and electrostatically levitated rotational gyroscopes developed in the world, this paper presents the respective characteristics of various structures, including their operating principles, fabrication processes and performances. Hence the research status and development of this novel micromachined gyroscope is outlined.更多还原