【摘要】 研究、设计了一种以柔性铰链为导向元件、压电陶瓷为驱动器的微定位机构,给出了机构的动力学模型。结合检测装置和微机控制系统,设计并研制了基于前馈控制同数字PID反馈控制相结合的复合控制的微定位系统。实验表明,微定位系统定位行程可达100μm,定位分辨力0.01μm。更多还原

【Abstract】 In this paper, a kind of micro-position mechanism driven by piezoele ctric actuator is researched and designed,which is guided by flexible joint. Dynamic model of mechanism is given. Combining computer system and detecting device, the micro-positioning system of compound control is designed and researched.This system is based on feedforward and digital PID control .Through experiment, it can be verified that the distance of system arrives at 100 μm and positioning resolution be 0.01 μm.更多还原