【摘要】 研制了一种集成在刀头内的新型薄膜式热电偶。在切削的同时,能快速直接地测量切削温度。镀膜工艺采用了先进的磁控溅射和离子镀技术,成功地解决了绝缘、镀膜牢固性等问题。该热电偶测温接点位于刀尖,响应迅速,时间常数约为0 8ms;并且在0～600℃的测温范围内具有良好的线性和热稳定性。详细论述了传感器的结构设计、薄膜热电偶的制作、静态标定、动态标定以及检测电路。当应用于现场切削试验时,传感器能快速响应瞬态切削温度。更多还原

【Abstract】 New type thin-film thermocouple integrating in the cutter was developed,which can directly measure the cutting temperature in the process of machining quickly.By means of the advanced techniques including magnetron sputtering and ion plating,the problems such as insulation and film adhesion were sucessfully resolved.The measuring junction was located in the tip of the cutter so that fast response is obtained and response time is about 0.8 ms.The thin-film thermocouple has good linearity and thermal stability in a temperature range from 0 to 600 ℃.The structure design,thin-film thermocouple manufacture,static calibration,dynamic calibration and measuring circuit were narrated in detail.When it is applied to machining on the spot,the sensor can fast respond to the cutting temerature at the real time and satisfied results were achieved.更多还原