【摘要】 介绍了纳米硬质薄膜的概念、设计思想、超硬机制、制备技术及工艺、性能、应用前景,综述了近几年来国内外纳米硬质薄膜材料研究的最新进展,对纳米硬质薄膜的发展趋势提出了一些看法。更多还原

【Abstract】 The concept,design superhard mechanisms,synthesis technologies and processes,properties,applications,and advancement of nano-hard film including nano-multilayers and nano-composite films were reviewed in this paper.Finally the trends in developing of nano-hard film were outlined.更多还原