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Enhancement of the orientation and adhesion of Al films on LiNbO3 with Ni underlayer

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【Author】 LI Dongmei1, 2), PAN Feng1), NIU Jiebin3), and LIU Ming3) 1) Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China 2) Institute of Chemistry and Chemical Engineering of Xinjiang University, Wulumuqi 830046, China 3) Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

【Abstract】 Al/Ni films were deposited on 128° Y-X LiNbO3 substrates by e-beam deposition. The influence of Ni under- layer on the microstructure, adhesion and resistivity of the Al/Ni films was investigated. It was found that Al films deposited on Ni underlayer thinner than 5 nm possessed strong texture. The textured Al/Ni films had a superior adhesion. Their resis- tivity decreased after annealing treatment at 200°C for 30 min. With the textured Al/Ni films, a 2.30 GHz-range im- age-impedance connection SAW (Surface Acoustic Wave) filter was successfully fabricated.

【关键词】 metal materials； Al/Ni films； electron-beam evaporation； microstructure； surface acoustic wave；
【Key words】 metal materials； Al/Ni films； electron-beam evaporation； microstructure； surface acoustic wave；
【基金】 [This work was financially supported by the National High-technology Project of China (No. 2002AA325040), the National Natural Science foundation of China (No. 50325105, 50371040) and the Key Grant of Chinese Ministry of Education (No. 0303).]
  • 【文献出处】 Rare Metals ,稀有金属(英文版) , 编辑部邮箱 ,2005年04期
  • 【分类号】TB43
  • 【被引频次】2
  • 【下载频次】35
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