【摘要】 获得系统的宏模型是MEMS系统级建模与仿真的关键.提出将小波变换的方法应用于MEMS降阶建模.介绍了小波变换的理论基础,提出了运用小波变换的方法对MEMS进行多尺度降阶建模的基本思想和算法的基本原理.针对最常见的静力学问题,建立了有限元求解方程,采用小波变换的方法提取出系统的几个不同阶次的降阶模型.算例表明:利用该方法通过适当的降阶次数,提取降阶模型可以大幅度地减少计算时间、降低计算复杂度,特别适合MEMS这种大系统的降阶建模.更多还原

【Abstract】 Obtaining the macro model of MEMS is the key of MEMS system-level modeling and simulation.In this paper,a method based on wavelet transform was applied to the reduced order modeling of MEMS.Theoretical principle was introduced.The basic idea for multiscale reduced modeling of MEMS and fundamentals of algorithm based on wavelet transform were presented.For the common statics problem,the FEM equation was built and several reduced order models with different orders were obtained.Numerical example demonstrates that reduced order model can greatly decrease the computing time and complexity and the model reduction method based on wavelet transform is especially practicable to model reduction for large-scale systems such as MEMS.更多还原