【摘要】 多晶硅TFT具有优良的电学性能,在显示中能够提供更亮、更精细的画面,被视为非晶硅TFT的理想替代品而被广泛地研究。本文主要评述非晶硅的晶化机理和主要研究结构,并简要介绍其应用。更多还原

【Abstract】 High electric performance poly- si thin- film transistors could provide brighter and subtler view. It has been researched widely and thoroughly. It is also considered as the perfectsubstitutefora- siTFT.Inthis paper,wereview severala- sicrystallizationmethods, main research structures and applications.更多还原