【摘要】 本文介绍一种高精度高分辨率的仪器———电容式动态薄膜测厚仪。详述仪器的工作原理、应用软件和数据处理方法更多还原

【Abstract】 A high-resolution and high-precision instrument,dyamic capacitance measuring instrument of thin film thickness,is introduced in this paper The operating principle of the instrument,the application software for the instrument and the method of data processing is introduced at the same time更多还原