【摘要】 在研究液体抗蚀剂受力分析的基础上,对液体抗蚀剂的甩胶原理,甩胶后抗蚀剂的液面形状、抗蚀剂涂层厚度与抗蚀剂黏度和马达转速之间的关系等进行了研究。结果表明,涂层表面形状为平面;随着马达转速的增加,涂层厚度逐渐减小;而随着抗蚀剂黏度的增大,涂层厚度却逐渐增大。在此基础上,以Epoxy 618为液体抗蚀剂进行了甩胶实验,得出了不同黏度下的转速-厚度曲线,验证了研究结果的正确性。最后给出了3μm厚的液体抗蚀剂Epoxy 618经SDS-II型电子束曝光机曝光后固化所得线条的JXA-8800R电子探针图。更多还原

【Abstract】 Based on analysis of applied force on liquid resist,the mechanism of spin-coating,the shape of liquid resist coating,the relations among resist thickness,viscosity and motor rotating speed are studied.The results show that the shape of liquid resist coating is plane,and the lower of viscosity and the higher of rotating speed,the thinner of resist coating.Then Epoxy 618 spin-coating experiments are made,the speed-thickness curves under different viscosities are got and the research results are validated.Finally,a JXA-8800R electron probe picture of Epoxy 618 line cured after 3 μm thick Epoxy 618 exposuring in SDS-II electron beams exposure system is presented.更多还原