节点文献
液态金属离子源发射系统的电场计算
Electric Field Calculation of Liquid Metal Ion Source Emitting System
【摘要】 针对液态金属离子源的发射系统属于轴对称系统的特点,采用动态喷流柱模型,利用模拟电荷法对液态金属离子源发射系统的电场进行了计算,结果表明,该方法计算精度高,非常适合于电子束、离子束系统发射极附近电场的计算。
【Abstract】 According to the characteristic of the axial symmetry of the liquid metal ion source emitting system,the electric field of the system is calculated by using the dynamic protrusion model and charge simulation method.The calculation result indicates that this method has very high calculation precision and fits to calculate emitting poles’ electric field of electron beam and ion beam system.
【关键词】 液态金属离子源;
模拟电荷法;
发射系统;
动态喷流柱;
【Key words】 liquid metal ion source; charge simulation method; emitting system; dynamic protrusion;
【Key words】 liquid metal ion source; charge simulation method; emitting system; dynamic protrusion;
- 【文献出处】 微细加工技术 ,Microfabrication Technology , 编辑部邮箱 ,2005年03期
- 【分类号】TM11;
- 【被引频次】1
- 【下载频次】61