【摘要】 概述了扫描电子束曝光机的检测对准原理,介绍了背散射电子信号特性及其在对准技术中的作用,并对背散射电子检测电路的组成和工作原理进行了阐述。同时给出了一种背散射电子检测电路实验装置的框图和原理图,所设计的多级滤波电路和PCB板的布线方式实现了对模拟信号处理电路噪声的抑制,从而得到了清晰的专用对准标记形貌图像。更多还原

【Abstract】 The registration principle of Scanning-electron-beam Lithography System, characteristic of backscattered electron signal and its function in registration technology, as well as backscat- tered electron detection circuit’s components and working principle are summarized·Meanwhile , the block and principle diagram of one backscattered electron detection circuit equipment is given· Specially designed multi-filter circuit and PCB layout technique realize the noise suppression of analog signal processing circuit to obtain the clear image of the special registration mark·更多还原