【摘要】 用于信号采集的传感器在石油勘探中是一个很重要的设备。本文主要介绍了一种新的石油勘探MEMS传感器的结构特点、介质材料以及封装方式,并详细地介绍了该产品的主要技术指标。更多还原

【Abstract】 Sensor used for Signal acquisition is important equipment for oil exploration. The paper mainly introduced a new MEMS sensor of oil exploration,characters of MEMS sensor structure, medium material and sealed form as well as already reached technical indexes.更多还原