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Co基磁性隧道结势垒结构的电子全息研究
Electron holography investigation on the barrier structures of Co based magnetic tunnel junctions
【摘要】 利用高分辨电子显微术和电子全息方法研究了Co基磁性隧道结退火热处理前后的微观结构及相应势垒层结构的变化.研究结果表明,退火处理可以明显地改善势垒层和顶电极、底电极之间的界面质量,改进势垒层本身的结构.这与该磁性隧道结经过280℃退火处理后,隧道磁电阻值大大增加是一致的.
【Abstract】 The barrier potential profiles and microstructure of Co based magnetic tunnel junctions (MTJs) annealed up to 340?℃ have been studied by electron holography (EH) and high resolution electron microscopy. The EH results reveal that the annealing process can well improve the quality of interfaces between barrier and ferromagnetic electrodes, and of AlO_x barrier itself, which are responsible for the improvement of tunneling magnetoresistance in MTJs after anneal at 280?℃.
【关键词】 磁性隧道结;
隧道磁电阻;
高分辨电子显微学;
电子全息;
【Key words】 magnetic tunnel junctions; tunneling magnetoresistance; high-resolution electron microscopy; electron holography;
【Key words】 magnetic tunnel junctions; tunneling magnetoresistance; high-resolution electron microscopy; electron holography;
【基金】 国家自然科学基金(批准号:19890310,50171078,50471054);国家重点基础研究发展规划(批准号:2002CB613500)资助的课题.~~
- 【文献出处】 物理学报 ,Acta Physica Sinica , 编辑部邮箱 ,2005年12期
- 【分类号】O482.51
- 【被引频次】7
- 【下载频次】103