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热处理对SILAR法制备CuInSe2薄膜性能的影响
Effects of Post-heat Treatment on Performance of Chalcopyrite CuInSe2 Film Prepared by SILAR Method
【Abstract】 CuInSe2 ternary films were prepared by successive ionic layer absorption and reaction (SILAR) method. The films were deposited on glass substrates at room temperature and subject to heat-treatment under Ar atmosphere at various calcination temperatures, and then characterized by using X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), optical absorption spectroscopy. XRD results showed that chalcopyrite structure CuInSe2 with high degree of preferred orientation towards (112) reflection could be obtained by post-heat treatment. The compositions of films calcined at 300~400 ℃ were close to the standard stoichiometry and Cl impurity decreased after calcination. The direct band gap increased from 0.94 eV to 0.98 eV with the increase of calcination temperature.
【Key words】 CuInSe2 films; SILAR method; calcination temperature; optical properties;
- 【文献出处】 无机化学学报 ,Chinese Journal of Inorganic Chemistry , 编辑部邮箱 ,2005年11期
- 【分类号】O614.3;
- 【被引频次】10
- 【下载频次】139