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热处理对SILAR法制备CuInSe2薄膜性能的影响

Effects of Post-heat Treatment on Performance of Chalcopyrite CuInSe2 Film Prepared by SILAR Method

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【作者】 杨建立靳正国石勇李春艳安贺松

【Author】 YANG Jian-Li JIN Zheng-Guo* SHI Yong LI Chun-Yan AN He-Song(Key Laboratory For Advanced Ceramics and Machining Technology of Ministry of Education,School of Materials, Tianjin University, Tianjin 300072)

【机构】 天津大学先进陶瓷与加工技术教育部重点实验室天津大学先进陶瓷与加工技术教育部重点实验室 天津300072天津300072天津300072

【Abstract】 CuInSe2 ternary films were prepared by successive ionic layer absorption and reaction (SILAR) method. The films were deposited on glass substrates at room temperature and subject to heat-treatment under Ar atmosphere at various calcination temperatures, and then characterized by using X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), optical absorption spectroscopy. XRD results showed that chalcopyrite structure CuInSe2 with high degree of preferred orientation towards (112) reflection could be obtained by post-heat treatment. The compositions of films calcined at 300~400 ℃ were close to the standard stoichiometry and Cl impurity decreased after calcination. The direct band gap increased from 0.94 eV to 0.98 eV with the increase of calcination temperature.

【基金】 天津市重点基础研究项目(No.33802311)资助。
  • 【文献出处】 无机化学学报 ,Chinese Journal of Inorganic Chemistry , 编辑部邮箱 ,2005年11期
  • 【分类号】O614.3;
  • 【被引频次】10
  • 【下载频次】139
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