【摘要】 介绍了一种新的脉冲激光真空弧沉积技术,利用该技术在硅基片上制备了类金刚石薄膜.利用激光拉曼分析技术对沉积膜进行了结构分析,结果表明沉积膜为非晶结构,具有明显的sp3结构特征.同时利用纳米划痕压痕仪、原子力显微镜等分析设备对膜的表面形貌、微观摩擦学性能进行了分析,结果表明Si<100>基片上沉积膜的表面形貌和微观摩擦学性能略优于Si<111>基片上沉积的薄膜,其摩擦系数平均值为0.036.更多还原

【Abstract】 Pulsed-laser-arc deposition technique was introduced. Diamond like carbon (DLC) films were deposited on Si<111> and Si<100> respectively. Results of laser raman spectroscopy showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological character were investigated by using atomic force microscope and nano-scratch tester. The results show that the surface microstructure and micro-tribological character of the film deposited on Si<100> is better than that deposited on Si<111>. The average friction coefficient of the film on Si<100> is 0.036.更多还原