【摘要】 本文对精密仪器微振动的控制方法进行了综合阐述。首先介绍了微振动的测量技术,它为微振动控振技术的实施提供了实测数据;其次说明了微振动产生的原因,并考虑振动在传播过程中的衰减,在控制振动时才能“对症下药”;最后重点阐述了各种控振方法的基本原理以及一些防振措施,并提出几点工程设计建议。更多还原

【Abstract】 The microvibration control methods of Hi - Tech facilities are discussed in detail. Firstly, the measurement technology is introduced, which provides on - the - spot data for the implementation of microvibration control. Secondly, the various sources and attenuation of microvibration are presented, on the basis of which appropriatl measures are taken into account for the microvibration control. Lastly, basic principles of various methods for microvibration control and corresponding anti - vibration technique are put forward in detail together with some suggestions for microvibration design.更多还原